• 集成气体转换模块
  • 22种气体嵌入
  • 多参数输出:质量流量、温度和压力
  • USB-C和蓝牙通信
  • Namur NE107状态指示

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FLEXI-FLOW Compact FF-M10 和 FF-M11紧凑型气体质量流量计适用于工作压力在真空和17 bar(a)条件下准确测量0…500 mln/min 和 0…20 ln/min之间的流量。仪表结合基于毛细管MEMS技术快速稳定的热式质量流量传感器和可靠准确的旁路结构。基于TCS技术,建立准确的质量流量测量,不受温度和管路压力变化影响。与集成温度和上下游压力传感器相结合,22种气体的嵌入式数据库实现精准集成转换。多参数仪表可提供过程信息:

  • FF-M10:流量+温度
  • FF-M11:流量+温度+上下游压力


Measurement / control system
Flow range (intermediate ranges available) min. 0…500 mln/min
max. 0…20 ln/min
(based on N2)
Pressure ranges FF-M10: not available / FF-M11: 0…17 bar(a)
Accuracy (incl. linearity) (based on actual calibration) Up to ±0.5% Rd plus ±0.1% FS (N2/Air/O2);
for other gases add conversion uncertainty
Repeatability Flow sensor: < ±0.2% Rd;
Pressure sensors: < ±0.2% FS
Turndown ratio up to 1:1000
Max. operating pressure 16 bar g
Multi Gas/Multi Range embedded gas data for 22 unique gases plus any mixture of these gases
Response time (sensor) 30 ms (T63)
Long term stability < 0.5% FS over period of 3 years; then < 0.2% FS per year
Mounting any position, attitude sensitivity negligible
Temperature sensitivity Flow sensor: zero 0.0015% FS/ºC; span 0.03% Rd/ºC;
Pressure sensors: zero 0.16 mbar/ºC; span 0.05% Rd/ºC
Temperature accuracy ± 0.2 ºC (instrument body temperature)
Accuracy pressure sensors ±0.5% FS
Pressure sensitivity standard: < 0.15% Rd/bar typical N2;
with pressure correction: < 0,02% Rd typical N2
Leak integrity, outboard tested < 2 x 10-9 mbar l/s He
Mechanical parts
Material (wetted parts) aluminium, stainless steel, silicon nitride, epoxy, aluminium oxide, glass
Surface quality 1.6 mu Ra (<0.8 mu Ra for stainless steel body)
Pressure rating (PN) 16 bar(g) / 250 psig
Process connections optional: compression type, push-in or face seal couplings
Seals default: FKM 51415;
for other materials contact factory
Weight 200 g with Aluminium body, 300 g with SS 316 body
Ingress protection IP40
Instrument body Aluminium or Stainless steel (selectable)
Electrical properties
Power supply 24 Vdc ± 10%
Max. power consumption 0.35 Watt
Digital communication Modbus RTU or FLOW-BUS (selectable)
Support interface USB-C port for easy setup;
Optional Bluetooth connection for monitoring
Electrical connection 9-pin D-sub (male)
Electrical connection
CE EMC 2014/30/EU, RED 2014/53/EU, RoHS 2011/65/EU

技术参数如有 变更,恕不另行通知。


FLEXI-FLOW brochure Download
Quick installation guide FLEXI-FLOW Download
快速安装指南 FLEXI-FLOW Download
使用说明书 FLEXI-FLOW Download
FLEXI-FLOW Compact Modbus-RTU / FLOW-BUS Download
Dimensions FLEXI-FLOW Compact MFC-MFM Download
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