FF-M1x
紧凑型气体质量流量计
- 集成气体转换模块
- 22种气体嵌入
- 多参数输出：质量流量、温度和压力
- USB-C和蓝牙通信
- Namur NE107状态指示
小流量气体质量流量计
FLEXI-FLOW Compact FF-M10 和 FF-M11紧凑型气体质量流量计适用于工作压力在真空和17 bar(a)条件下准确测量0…500 mln/min 和 0…20 ln/min之间的流量。仪表结合基于毛细管MEMS技术快速稳定的热式质量流量传感器和可靠准确的旁路结构。基于TCS技术，建立准确的质量流量测量，不受温度和管路压力变化影响。与集成温度和上下游压力传感器相结合，22种气体的嵌入式数据库实现精准集成转换。多参数仪表可提供过程信息：
- FF-M10：流量+温度
- FF-M11：流量+温度+上下游压力
技术参数
| Measurement / control system | |
|---|---|
| Flow range (intermediate ranges available) | min. 0…500 mln/min max. 0…20 ln/min (based on N2) |
| Pressure ranges | FF-M10: not available / FF-M11: 0…17 bar(a) |
| Accuracy (incl. linearity) (based on actual calibration) | Up to ±0.5% Rd plus ±0.1% FS (N2/Air/O2); for other gases add conversion uncertainty |
| Repeatability | Flow sensor: < ±0.2% Rd; Pressure sensors: < ±0.2% FS |
| Turndown ratio | up to 1:1000 |
| Max. operating pressure | 16 bar g |
| Multi Gas/Multi Range | embedded gas data for 22 unique gases plus any mixture of these gases |
| Response time (sensor) | < 30 ms (T63) |
| Long term stability | < 0.5% FS over period of 3 years; then < 0.2% FS per year |
| Mounting | any position, attitude sensitivity negligible |
| Temperature sensitivity | Flow sensor: zero 0.0015% FS/ºC; span 0.03% Rd/ºC; Pressure sensors: zero 0.16 mbar/ºC; span 0.05% Rd/ºC |
| Temperature accuracy | ± 0.2 ºC (instrument body temperature) |
| Accuracy pressure sensors | ±0.5% FS |
| Pressure sensitivity | standard: < 0.15% Rd/bar typical N2; with pressure correction: < 0,02% Rd typical N2 |
| Leak integrity, outboard | tested < 2 x 10-9 mbar l/s He |
| Mechanical parts | |
|---|---|
| Material (wetted parts) | aluminium, stainless steel, silicon nitride, epoxy, aluminium oxide, glass |
| Surface quality | < 1.6 mu Ra (<0.8 mu Ra for stainless steel body) |
| Pressure rating (PN) | 16 bar(g) / 250 psig |
| Process connections | optional: compression type, push-in or face seal couplings |
| Seals | default: FKM 51415; for other materials contact factory |
| Weight | 200 g with Aluminium body, 300 g with SS 316 body |
| Ingress protection | IP40 |
| Instrument body | Aluminium or Stainless steel (selectable) |
| Electrical properties | |
|---|---|
| Power supply | 24 Vdc ± 10% |
| Max. power consumption | 0.35 Watt |
| Digital communication | Modbus RTU or FLOW-BUS (selectable) |
| Support interface | USB-C port for easy setup; Optional Bluetooth connection for monitoring |
| Electrical connection | 9-pin D-sub (male) |
| Electrical connection | |
|---|---|
| CE | EMC 2014/30/EU, RED 2014/53/EU, RoHS 2011/65/EU |
技术参数如有 变更，恕不另行通知。
更多资料
| 样册 | |
|---|---|
| FLEXI-FLOW brochure |  |
| 说明书 | |
|---|---|
| Quick installation guide FLEXI-FLOW | |
| 快速安装指南 FLEXI-FLOW | |
| 使用说明书 FLEXI-FLOW | |
| 安装图 | |
|---|---|
| FLEXI-FLOW Compact Modbus-RTU / FLOW-BUS | |
| 尺寸图 | |
|---|---|
| Dimensions FLEXI-FLOW Compact MFC-MFM | |
