FF-C1x
紧凑型气体质量流量控制器
紧凑型气体质量流量控制器
- 快速稳定控制
- 集成气体转换模块
- 22种气体嵌入
- 多参数输出：质量流量、温度和压力
- USB-C和蓝牙通信
- Namur NE107状态指示
小流量气体质量流量控制器
FLEXI-FLOW 紧凑型质量流量控制器适用于工作压力在真空和17 bar(a)条件下准确测量0…500 mln/min 和 0…20 ln/min之间的流量。仪表结合基于毛细管MEMS技术快速稳定的热式质量流量传感器和可靠准确的旁路结构。基于TCS技术，建立准确的质量流量测量，不受温度和管路压力变化影响。与集成温度和上下游压力传感器相结合，22种气体的嵌入式数据库实现精准集成转换。多参数仪表可提供过程信息。
FLEXI-FLOW紧凑型质量流量控制器目前可选：
- “预配置高端型” (PA), 量程比 1:500, 流量 + 温度 + 上下游压力, 4 个量程 (FS, N2当量):
Type FF-A500 – 500 mln/min
Type FF-A2K0 – 2 ln/min
Type FF-A5K0 – 5 ln/min
Type FF-A20K – 20 ln/min - “预配置标准型”(PS), 量程比 1:50, 流量 + 温度, 4个量程 (FS, N2当量):
Type FF-S500 – 500 mln/min
Type FF-S2K0 – 2 ln/min
Type FF-S5K0 – 5 ln/min
Type FF-S20K – 20 ln/min - “定制”(BtO), 量程比 1:1000; 可选量程0.5 和 20 ln/min (FS, N2当量),
Type FF-C10: 流量 + 温度
Type FF-C11: 流量 + 温度 + 上下游压力;
BtO型号也适用于多通道配置，高达8个通道。
技术参数
| Measurement / control system | |
|---|---|
| Flow range (intermediate ranges available) | min. 0…500 mln/min max. 0…20 ln/min (based on N2) |
| Pressure ranges | PA: 0…17 bar(a) PS: not available BtO: FF-C10: not available / FF-C11: 0…17 bar(a) |
| Accuracy (incl. linearity) (based on actual calibration) | PA: ±0,8% Rd plus ±0,2% FS (N2/Air/O2); PS: ±1,5% Rd plus ±0,5% FS (N2/Air/O2); BtO: Up to ±0,5% Rd plus ±0,1% FS (N2/Air/O2); for other gases add conversion uncertainty; see multi gas table; |
| Repeatability | Flow sensor: < ±0,2% Rd; Pressure sensors: < ±0,2% FS |
| Turndown ratio | PS: 1:50 PA: 1:500 BtO: up to 1:1000 |
| Max. operating pressure | 16 bar g |
| Multi Gas/Multi Range | embedded gas data for 22 unique gases plus any mixture of these gases |
| Settling time (in control, typical) | < 150 ms |
| Long term stability | < 0,5% FS over period of 3 years; then < 0,2% FS per year |
| Control stability | < ± 0,1% FS (typical for 1 ln/min N2) |
| Operating temperature | 0…50 °C |
| Mounting | any position, attitude sensitivity negligible |
| Temperature sensitivity | Flow sensor: zero 0,0015% FS/ºC; span 0,03% Rd/ºC; Pressure sensors: zero 0,16 mbar/ºC; span 0,05% Rd/ºC |
| Temperature accuracy | ± 0,2 ºC (instrument body temperature) |
| Accuracy pressure sensors | ±0,5% FS |
| Pressure sensitivity | standard: < 0,15% Rd/bar typical N2; with pressure correction: < 0,02% Rd typical N2 |
| Leak integrity, outboard | tested < 2 x 10-9 mbar l/s He |
| Leak-by through closed valve | typical < 1 x 10-4 mbar·l/s He |
| Mechanical parts | |
|---|---|
| Material (wetted parts) | aluminium, stainless steel, silicon nitride, epoxy, aluminium oxide, glass |
| Surface quality | < 1,6 mu Ra (<0,8 mu Ra for stainless steel body) |
| Pressure rating (PN) | 16 bar(g) / 250 psig |
| Max. ΔP | 16 bar(d); 20 ln/min models: 5 bar (d) |
| Process connections | BtO: compression type, push-in or face seal couplings; PS / PA: to be ordered separately |
| Seals | FKM 51415; valve seat: FFKM with PI film BtO option: for other materials contact factory |
| Weight | 200 g with Aluminium body, 300 g with SS 316 body |
| Ingress protection | IP40 |
| Instrument body | BtO: Aluminium or Stainless steel (selectable); PS / PA: Aluminium |
| Electrical properties | |
|---|---|
| Power supply | 24 Vdc ± 10% |
| Max. power consumption | 2,0 Watt |
| Digital communication | Modbus RTU or FLOW-BUS (selectable) |
| Support interface | USB-C port for easy setup; Optional Bluetooth connection for monitoring |
| Electrical connection | 9-pin D-sub (male) |
| Electrical connection | |
|---|---|
| CE | EMC 2014/30/EU, RED 2014/53/EU, RoHS 2011/65/EU |
技术参数如有变更，恕不另行通知。
更多资料
| 样册 | |
|---|---|
| FLEXI-FLOW brochure |  |
| 说明书 | |
|---|---|
| Quick installation guide FLEXI-FLOW | |
| 快速安装指南 FLEXI-FLOW | |
| 使用说明书 FLEXI-FLOW | |
| 安装图 | |
|---|---|
| FLEXI-FLOW Compact Modbus-RTU / FLOW-BUS | |
| 尺寸图 | |
|---|---|
| Dimensions FLEXI-FLOW Compact MFC-MFM | |
